Axcelis Technologies, Inc, a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced follow-on shipments of the Purion H™ high current implanter to multiple fabs in support of the customer’s most advanced logic device technology manufacturing ramp. The systems shipped in the fourth quarter of 2022.
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The Purion H offers advanced logic customers unmatched levels of process control, market leading throughput & uniformity.
Executive Vice President, Marketing and Applications, Greg Redinbo, commented, “We’re excited to support the manufacturing ramp at our customer’s advanced logic fabs. The Purion H has an innovative high current implanter architecture, featuring unique scanned spot beam technology, designed for advanced memory and logic applications. The Purion H offers advanced logic customers unmatched levels of process control, coupled with market leading throughput and uniformity, enabling chip manufacturers to achieve greater yield with the lowest cost of ownership.”
SOURCE: PR Newswire